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Multiphysics modelling and experimental validation of microelectromechanical resonator dynamics Multiphysics modelling and experimental validation of microelectromechanical resonator dynamics / by Robertus M.C. Mestrom – Eindhoven : Technische Universiteit Eindhoven, 2009 – Proefschrift A catalogue record is available from the Eindhoven University of Technology Library ISBN: 978-90-386-2034-3 NUR: 978 This thesis was prepared with the LATEX 2ε documentation system Reproduction: Ipskamp Drukker
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  Multiphysics modelling and experimentalvalidationof microelectromechanicalresonator dynamics  Multiphysics modelling and experimental validation of microelectromechanicalresonator dynamics / by Robertus M.C. Mestrom – Eindhoven : TechnischeUniversiteit Eindhoven, 2009 – ProefschriftA catalogue record is available from the Eindhoven University of Technology LibraryISBN: 978-90-386-2034-3NUR: 978This thesis was prepared with the L A TEX2 ε  documentation systemReproduction: Ipskamp Drukkers B.V., Enschede, The NetherlandsCover design: Rob MestromCopyright c  2009 by R.M.C. Mestrom. All rights reserved.  Multiphysics modelling and experimentalvalidationof microelectromechanicalresonator dynamics PROEFSCHRIFT ter verkrijging van de graad van doctor aan deTechnische Universiteit Eindhoven, op gezag van derector magnificus, prof.dr.ir. C.J. van Duijn, voor eencommissie aangewezen door het College voorPromoties in het openbaar te verdedigenop donderdag 12 november 2009 om 16.00 uurdoor Robertus Matheus Catharina Mestrom geboren te Weert  Dit proefschrift is goedgekeurd door de promotor:prof.dr. H. NijmeijerCopromotor:dr.ir. R.H.B. Fey
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